| Code# | 525-020DP |
|---|---|
| Granite Stage | (310*220) mm |
| Glass Stage | (179.5*129.5) mm |
| X/Y Axis Travel | (150*100) mm |
| Linear Scales | Resolution: 0.5um |
| Código # | Se trata de un sistema de control de las emisiones de gases. |
|---|---|
| Escenario de granito | (310*220) mm |
| Etapa de cristal | (179,5*129,5) mm |
| Recorrido del eje X/Y | (150*100) mm |
| Escalas lineales X/Y | Resolución: 0,5 mm |
| Código # | 512 a 350 |
|---|---|
| Tamaño de la etapa de trabajo | 355x126 mm |
| Viajes de la etapa de trabajo | 200x100m m |
| Concentrarse | 90 mm |
| Precisión | ≤3+L/200 (um) |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |